Products Pattern AOI

InSmart Extreme UV

Dimension 1,360 (W) X 2,600 (L) X 1,900 (H) mm Exclusive of Monitor
Weight 3,200 Kg
Panel Size Standard Max: 510 * 515 mm
※ Need to replace wing plate due to size change
Line / Space Above 5㎛ ~ 10㎛
Detectable Flaws Short (Stealth Shorts, Cu residue, Micro-Short), Open Protrusion, Island, Minimum Line/Space Violations Shorts, Opens, Nicks, Protrusions, Cu Remains, Micro-Short, Minimum Line/Space Violations, Etc