AOI

Automated Optical Inspection

AOI

Automated Optical Inspection

Delivers superior defect detection performance with automated optical solutions optimized for a wide range of industrial applications

GigaVis's Automated Optical Inspection (AOI) solution
provides unrivaled technological capabilities for the
precise inspection of microscopic defects in patterns and
holes in semiconductor substrates and next-generation technology applications.

Watch Demo Video

Main

Package Substrate

FC-BGA
FC-CSP

PCB & Materials

MLB
HDI
FPCB
CCL

Expansion

Glass Mask
Thin Flim Power Inductor

Advance

Semiconductor Mid-end

PLP
FC-WLP

PCB & Materials

Glass Substrate

InSmart Nano

Product Introduction

InSmart Nano 2/2

InSmart Nano 2/2 — Dimension, Weight, Panel Size, Line/Space specifications
ITEM	SPECIFICATIONS
Dimension	1,460 (W) * 2,660 (D) * 2300 (H) mm
Weight	4,100 Kg, Possible to change due to option
Panel Size	Standard Max: 510 * 515 mm
Line / Space	Above 2 / 2㎛

InSmart Ultimate

InSmart Nano 2/2 — Dimension, Weight, Panel Size, Line/Space specifications
ITEM	SPECIFICATIONS
Dimension	1,440 (W) * 2,300 (D) * 2300 (H) mm, with cleaner option 2,600 (D)
Weight	4,100 Kg, with cleaner option 4,500 Kg
Panel Size	Standard Max: 510 * 515 mm
Line / Space	Above 4 / 4㎛

InSmart Extreme

InSmart Nano 2/2 — Dimension, Weight, Panel Size, Line/Space specifications
ITEM	SPECIFICATIONS
Division	Extreme	Extreme Color	Extreme UV
Dimension	1,200 (W) * 2,040 (L) * 2,300 (H) mm	1,200 (W) * 2,040 (L) * 2,300 (H) mm	1,360 (W) X 2,600 (L) X 1,900 (H) mm
Weight	2,600 Kg	2,600 Kg	3,200 Kg
Panel Size	Standard .Max: 650 * 610 mm	Standard .Max: 650 * 610 mm	Standard Max: 510 * 515 mm ※ Need to replace wing plate due to size change
Line / Space	Above 5 / 5㎛

InSmart Premier

InSmart Nano 2/2 — Dimension, Weight, Panel Size, Line/Space specifications
ITEM	SPECIFICATIONS
Dimension	1,160(W) * 2,400(L) * 1,700(H) mm
Weight	2,300 Kg
Panel Size	Standard .Max: 650 * 610 mm
Line / Space	Above 10 / 10㎛

InSmart - 20S

InSmart Nano 2/2 — Dimension, Weight, Panel Size, Line/Space specifications
ITEM	SPECIFICATIONS
Dimension	1,160(W) * 2,400(L) * 1,700(H) mm
Weight	2,300 Kg
Panel Size	Standard .Max: 650 * 610 mm
Line / Space	Above 25 / 25㎛

InSmart Via - Ⅳ

InSmart Via - Ⅳ — Dimension, Weight, Panel Size, Line/Space specifications
ITEM	SPECIFICATIONS
Dimension	-
Weight	-
Panel Size	-
Line / Space	Above 30㎛

InSmart GM

InSmart GM — Dimension, Weight, Panel Size, Line/Space specifications
ITEM	SPECIFICATIONS
Dimension	1,800(W) * 3,500(L) * 1,850(H) mm
Weight	4,500kg
Panel Size	2.3T ~ 8.0T
Line / Space	0.92/0.92㎛ @ 0.277㎛ Resolution 1.84/1.84㎛ @ 0.554㎛ Resolution

Defect Image Acquisition

MONO
COLOR
UV