AOR
Automated Optical Repair
AOR
Automated Optical Repair
Ensures tangible yield improvement and
profitability for users
GigaVis's Automated Optical Repair (AOR) technology
delivers differentiated yield improvement capabilities by precisely repairing defects in high-value-added semiconductor substrates, transforming defective substrates that would
otherwise be discarded into high-quality products.
Precision Repair
High-precision repair technology
for substrate defects
Yield Improvement
Minimizes losses from defective products
and maximizes usable yield
Profit Enhancement
An essential process for manufacturing
high-value-added semiconductor substrates
SSR - Ⅴ
Product Introduction
SSR - Ⅴ
| ITEM | SPECIFICATIONS |
|---|---|
| Dimension | - |
| Weight | - |
| Repaired Defects | - |
| Line / Space | Min 2 / 2㎛ |
SSR - Ⅳ
| ITEM | SPECIFICATIONS |
|---|---|
| Dimension | 1,680(W) * 1,740(L) * 1,879(H) mm |
| Weight | 1,900 Kg |
| Repaired Defects | Any Excess Copper Type : Short, Protrusion, μShort, Etc. |
| Line / Space | Min 5 / 5㎛ |
SSR - Ⅲ
| ITEM | SPECIFICATIONS |
|---|---|
| Dimension | 1,580(W) * 1,730(L) * 1,420(H) mm |
| Weight | 1,500 Kg |
| Repaired Defects | Any Excess Copper Type : Short, Protrusion, μShort, Etc. |
| Line / Space | Min 10 / 10㎛ |
Repair Image Acquisition
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Before 
After -
Before 
After
